Non-Destructive Fully Automated Subsurface Metrology and Inspection for the Semiconductor Industrybroad
AUDIRA · Horizon Europe grant · 2024-11-01–2026-04-30
EC contribution
Total cost
Beneficiaries
About the data
Source: CORDIS (official EU open data), Horizon Europe. Framework HORIZON · call HORIZON-EIC-2024-ACCELERATOR-02 · scheme HORIZON-EIC-ACC · topic HORIZON-EIC-2024-ACCELERATOROPEN-01. CORDIS record →
Objective
Nearfield Instruments (NFI) is the only European organization offering advanced metrology and inspection (M&I) solutions for the semiconductor industry. In a nutshell, NFI develops machines used by chip manufacturers to check the quality of their products. Without M&I machines, the whole microelectronics industry would not exist, and society would be very different from as we know it today.During the EIC project, we will mature the most advanced M&I machine worldwide, called AUDIRA. AUDIRA will be the first and only technology that can perform non-destructive subsurface metrology and inspection, which means that is able to measure through and below multiple layers of the wafer without damaging it. The need for revolutionary M&I systems, like AUDIRA, is a direct consequence of the evolution of semiconductor devices to smaller geometries and more complex multi-level circuitry. The construction of an advanced wafer fabrication facility to manufacture these devices can cost over €5 billion, which is substantially more than previous- generation facilities. Therefore, chipmakers need to increase the yield to maximize the returns from their manufacturing equipment.Hence, the need for advanced M&I machines, like AUDIRA. AUDIRA is at TRL 5 and will be taken to TRL 8 during the EIC project. NFI is a reputed organization in this industry, with over 160+ FTEs and an experienced management board. The Chairman of the NFI Supervisory Board is Eric Meurice, former CEO of ASML. NFI has a large IP portfolio (71 patents, 29 owned and 42 licensed by TNO, the research institute from which NFI spun off), three locations worldwide, and existing commercial relationships with the most prestigious semiconductor companies, including Samsung, Intel, and TSMC. Our company will break even in 2026, and thanks to our high margins, we will cumulate over 1 Bn€ in net income in just three years (2026-28) also thanks to the commercialization of a different, yet related, M&I system called QUADRA.
Beneficiaries (1)
| Organisation | Country | Role | EC contribution | SME |
|---|---|---|---|---|
| NEARFIELD INSTRUMENTS B.V. | NL | coordinator | €2,496,499 | Yes |
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